Overview

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials.

Historical Background

Introduces historical background of SPL, including evolution of the technique and tools

Mechanisms and Materials

Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied

Device Fabrication

Shows the different types of devices and structures fabricated by SPL, together with the processing steps

Examples and Approaches

Contains a complete and state-of-the-art package of examples and different approaches, performed by different international research groups

Summary

Summarizes strengths, limitations, and potential of SPL

This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.