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Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Consider future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials.
Microlithography
Nanolithography
Nano Lithography
Fundamental Principles of Optical Lithography
Materials and Processes for Next Generation Lithography
Photoresist Technology in Microsystems: Principles, Processes and Applications
Lithography
Handbook of Photomask Manufacturing Technology
Manufacturing Techniques for Microfabrication and Nanotechnology
Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Micro- and Nanofabrication for Beginners
Micro and Nano Fabrication Technology
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