Modeling MEMS and NEMS

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Modeling MEMS and NEMS

Nanotechnology Precision engineering and manufacturing

Authors: John A. Pelesko, David H. Bernstein

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Language: English

Published by: CRC Press

Published on: 25th November 2002

Format: LCP-protected ePub

ISBN: 9781040066485


Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model.

Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

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