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• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Surface Metrology for Micro- and Nanofabrication
Micro- and Nano-Scale Sensors and Transducers
Outlook and Challenges of Nano Devices, Sensors, and MEMS
Metrology and Diagnostic Techniques for Nanoelectronics
Micro and Nano Machined Electrometers
Nano- and Micro-Electromechanical Systems
Advanced MEMS/NEMS Fabrication and Sensors
Nanoelectromechanical Systems
Fundamental Principles of Engineering Nanometrology
Micro Electro Mechanical Systems
MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
Nanoscale Devices
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