Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

Synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials.

This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena

Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations

Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors