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Flash Lamp Annealing
From Basics to Applications
Introduction
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background.
Advantages and Process Issues
Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing.
Applications and Case Studies
Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations.
Target Audience
This book is a valuable reference work for both novice and advanced users.
