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As microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them. A comprehensive survey of defe
Defects and Impurities in Silicon Materials
Defects in Optoelectronic Materials
Defects in Organic Semiconductors and Devices
Defects in Semiconductors
Silicon, Germanium, and Their Alloys
Defects in Advanced Electronic Materials and Novel Low Dimensional Structures
Reliability of Organic Compounds in Microelectronics and Optoelectronics
High k Gate Dielectrics
Damage and Failure of Interfaces
Circuit Design Techniques for Non-Crystalline Semiconductors
CMOS Plasma and Process Damage
Engineering of Point Defects in Solids
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