£109.50
This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to the chips, functional failure and reliability problems.
Plasma Etching Processes for CMOS Devices Realization
Plasma Etching Processes for Interconnect Realization in VLSI
Plasma Electronics
Defects in Microelectronic Materials and Devices
Plasma Physics and Engineering
Principles of Plasma Discharges and Materials Processing
Handbook of Digital CMOS Technology, Circuits, and Systems
Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing
Radiation Effects in Semiconductors
Nano-CMOS Gate Dielectric Engineering
Silicon Semiconductor Technology
MOS System