Adhesion Aspects in MEMS/NEMS

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Adhesion Aspects in MEMS/NEMS

Nanotechnology Precision engineering and manufacturing Materials science

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Language: English

Published by: CRC Press

Published on: 18th February 2011

Format: LCP-protected ePub

ISBN: 9781040192214


Phenomena associated with the adhesion interaction of surfaces

have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated.

These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects.

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