Introduction

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications.

Fabrication and Testing

It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds.

Dislocation, Fatigue, and Fracture

The author also presents dislocation in silicides, fatigue and fracture aspects.

Nano Scale Deformation

A special chapter is given on deformation in silicides in the nano scale.

Composites and Alloys

Composites and alloys are also considered.