The Handbook of Thin Film Process Technology

This practical handbook is designed for the thin film scientist, engineer, and technician. It is regularly updated with new material, ensuring it remains a valuable resource.

Special Issue on Reactive Sputtering

This volume features a special focus on reactive sputtering, which will be of interest to a wide range of industrial and academic researchers, as well as owners of the main Handbook.

Recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice, and manufacturing techniques.