Overview

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.

Organization and Content

Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.

Applications and Technologies

A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectromechanical systems) for energy, environments, communications, and/or biomedical fields.

New chapters on computer simulation of sputtering and MEMS complete the update and ensure that the new edition includes the most current and forward-looking coverage available.

Theoretical Support

All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique.

Revision Highlights

40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.