Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS

From basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models.

Theoretical Framework and Principles

The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts.

Design Perspective and Analogies

Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm.

Educational Features

Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.