Introduction to Scanning Optical Microscopy

This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given.

Practical Aspects and Applications

The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.

Theoretical Insights

A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.

Key Topics Covered

Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers

Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology

Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations

Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications

Discusses the theory and design of near-field optical microscopes

Explains phase imaging in the scanning optical and interference microscopes