Chemistry of Atomic Layer Deposition

£71.50

Chemistry of Atomic Layer Deposition

Author: Sean Thomas Barry

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Collection: De Gruyter Textbook

Language: English

Published by: De Gruyter

Published on: 8th November 2021

Format: LCP-protected ePub

ISBN: 9783110712599


This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

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